GloryPolaris is the highest-accuracy field solver in the GloryEX product family. Based on the Finite Difference Method (FDM), it solves Maxwell's partial differential equations to serve as the golden standard for parasitic extraction accuracy. GloryPolaris performs high-fidelity 3D modeling based on foundry silicon data, pattern libraries, design rules, and process profiles provided by Foundry TD teams, incorporating BEOL, CMP, and Etch-Loading process effect modules to deliver simulation results that closely match actual manufacturing processes.

High-Precision Capacitance/Resistance Computation:
Built-in high-precision field solver with automated mesh generation and optimization, reducing single-core solve time and scope. Supports Cco-Cf modeling with tight SPICE model correlation for Interconnect Model generation.
Process Effect & Model Structure Libraries:
Comprehensive process effect library and generic model structure library support common interconnect model structure creation with multiple process effect integration. Automated input file generation reduces modeling preparation time.
Flexible Structure Definition Syntax:
Structure definition files support loops, conditional statements, and mathematical operations including arithmetic, exponential, logarithmic, absolute value, and trigonometric functions for direct complex structure definition. Graphical Boolean operations with priority settings simplify defining occlusion relationships between conductors and dielectric layers.
Intuitive GloryPolaris Viewer GUI:
GloryPolaris Viewer supports direct import of structure files for 3D rendering with 360° rotation and adjustable transparency for observing spatial relationships between geometries. Customizable display settings enable real-time structure correctness checking, with support for importing and displaying post-solve potential distribution maps.



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