GloryPolaris®
GloryPolaris is a high-precision 3D parasitic modeling tool—the golden-reference (highest-accuracy) field solver of the τ-Aware ToolFramework. Based on the Finite-Difference Method (FDM) for solving Maxwell's equations, it performs high-fidelity 3D modeling from silicon data, test patterns, design rules, and process profiles provided by foundry TD teams, and supports process-effect modules including BEOL, CMP, and etch loading.
Key Features
High-precision capacitance/resistance calculation:Built-in high-precision field solver with automated mesh-generation and optimization methods that shorten single-core solve time.
Tight SPICE model correlation: Supports Cco-Cf modeling with tight SPICE model correlation, as well as interconnect model generation.
Process-effect library and generic model-structure library: Ships with a comprehensive process-effect library and a generic model-structure library, supporting the creation of common interconnect-model structures combined with multiple process effects.
Automated structure generation: Supports automated generation of key interconnect structures, shortening modeling turnaround time.
Easy-to-use GUI: Checks structure correctness in real time; imports structure files to generate 3D renderings with 360° rotation; imports and displays post-solve potential-distribution maps.
Products Highlights
Applications
Application Scenarios
High-accuracy solving of device-level parasitic capacitance, and the creation of generic Structure A/B configurations for metal-interconnect models (interconnect models), serving as the accuracy target for process-file convergence.